CINXE.COM

<!DOCTYPE html> <html lang="en"> <head> <meta content="text/html; charset=utf-8" http-equiv="Content-Type"> <title>BNL | Instrumentation | Fabrication Cleanrooms</title> <meta name="description" content="For more than 20 years, the Silicon Sensor Fabrication Cleanroom in Brookhaven Lab鈥檚 Instrumentation Department has been a main center for the development and production of prototype silicon (Si) radiation sensors."> <link rel='preconnect' href='https://fonts.googleapis.com'> <link rel='preconnect' href='https://fonts.gstatic.com' crossorigin> <link href='https://fonts.googleapis.com/css2?family=Roboto:ital,wght@0,100;0,300;0,400;0,500;0,700;0,900;1,100;1,300;1,400;1,500;1,700;1,900&display=swap' rel='stylesheet'> <link rel='stylesheet' type='text/css' media='all' href='/assets/global/packages/fontawesome-6/css/all.min.css' /> <link rel='stylesheet' type='text/css' media='all' href='/assets/global/packages/fontawesome-5/css/all.min.css' /> <link rel='stylesheet' type='text/css' media='all' href='/common/icons/latest/css/font-awesome.min.css' /> <link rel='stylesheet' type='text/css' media='all' href='/common/jquery/jquery-ui/latest/jquery-ui.css' /> <link rel='stylesheet' type='text/css' media='all' href='/assets/global/css/bnl-2021.css?v=2.26' /> <link rel='stylesheet' type='text/css' media='all' href='/assets/global/css/nav/color-1/5.css' /> <link rel='apple-touch-icon' sizes='180x180' href='/apple-touch-icon.png'> <link rel='icon' type='image/png' sizes='32x32' href='/favicon-32x32.png'> <link rel='icon' type='image/png' sizes='16x16' href='/favicon-16x16.png'> <link rel='manifest' href='/site.webmanifest'> <meta name='google-translate-customization' content='da871b882e58855f-cd5178aa4095a4ca-gc2ffe725f2da0f37-b' /> <meta name='viewport' content='width=device-width, initial-scale=1' /> <style type="text/css"> .themeBanner { background-image: url('../images/banners/banner-facilities.jpg'); } #footer { margin-top:0; } </style> <link rel="stylesheet" type="text/css" href="../css/site.css">    <script async src="https://www.googletagmanager.com/gtag/js?id=G-67KBDFNCYG"></script> <script> window.dataLayer = window.dataLayer || []; function gtag(){dataLayer.push(arguments);} gtag('js', new Date()); gtag('config', 'G-67KBDFNCYG'); </script> </head> <body> <div class="content"> <noscript> <div id="NoJavaScript"> <div class="container_24"> <div class="grid_24"> Because you are not running JavaScript or allowing active scripting, some features on this page my not work.  >> <a target="_blank" href="https://enable-javascript.com/"> Enable Javascript</a> << </div> </div> <div class="clear"></div> </div> </noscript><div id="BNL-mobile-menu"> <p id="subnavMobileHead">Local Navigation</p> <ul id="subnavMobile"></ul> <p id="siteMenuMobileHead" class="mobileMenuHead">Site Navigation<span class="fa fa-angle-double-left fa-lg closeMobileMenuIcon"></span></p> <ul id="siteMenuMobile"></ul> <p id="globalLinksMobileHead" class="mobileMenuHead">General Lab Information</p> <ul id="globalLinksMobile"></ul> </div> <div id="header"> <div class="container_24"> <div class="grid_24"> <ul id="globalLinks" class="responsiveLinkList2"> <li><a href="https://www.bnl.gov/science/">Our Science</a> <li><a href="https://www.bnl.gov/about/">About</a> <li><a href="javascript:void(0);" class="gd-link" >Departments</a> <li><a href="https://www.bnl.gov/partner/">Partner With Us</a> <li><a target="_blank" href="https://jobs.bnl.gov/">Careers</a> <li><a href="https://www.bnl.gov/newsroom/">News</a> <li><a href="https://www.bnl.gov/contact-us/">Contact</a> <li><a href="https://www.bnl.gov/directory/">Directory</a> <li><a href="javascript:void(0);" class="gd-link"><span class="fa fa-search"></span> Search</a> </ul> </div> </div> </div> <div class="gd" id="gd-2"> <div class="container_24"> <div class="grid_4"> <ul class="responsiveLinkList2"> <li><a href="https://www.bnl.gov/energysci/">Energy & Photon Sciences</a> <li><a href="https://www.bnl.gov/cfn/">Center for Functional Nanomaterials</a> <li><a href="https://www.bnl.gov/chemistry/">Chemistry</a> <li><a href="https://www.bnl.gov/cmpmsd/">Condensed Matter Physics & Materials Science</a> <li><a href="https://www.bnl.gov/isd/">Interdisciplinary Science</a> <li><a href="https://www.bnl.gov/nsls2/">National Synchrotron Light Source II</a> </ul> </div> <div class="grid_4"> <ul class="responsiveLinkList2"> <li><a href="https://www.bnl.gov/ebnn/">Environment, Biology, Nuclear Science & Nonproliferation</a> <li><a href="https://www.bnl.gov/biology/">Biology</a> <li><a href="https://www.bnl.gov/envsci/">Environmental and Climate Sciences</a> <li><a href="https://www.bnl.gov/nst/">Nuclear Science and Technology</a> <li><a href="https://www.bnl.gov/nns/">Nonproliferation and National Security</a> </ul> </div> <div class="grid_4"> <ul class="responsiveLinkList2"> <li><a href="https://www.bnl.gov/compsci/">Computational Sciences</a> <li><a href="https://www.bnl.gov/compsci/mathematics.php">Computer Science and Applied Mathematics</a> <li><a href="https://www.bnl.gov/compsci/natsec.php">Computing for National Security</a> <li><a href="https://www.bnl.gov/compsci/sdcc/">Scientific Data and Computing Center</a> <li><a href="https://www.bnl.gov/compsci/c3d/">Computation and Data-Driven Discovery</a> <li><a href="https://www.bnl.gov/compsci/computational-lab.php">Computational Science Lab</a> </ul> </div> <div class="grid_4"> <ul class="responsiveLinkList2"> <li><a href="https://www.bnl.gov/npp/">Nuclear & Particle Physics</a> <li><a href="https://www.bnl.gov/cad/">Collider-Accelerator</a> <li><a href="https://www.bnl.gov/mirp/">Isotope Research & Production</a> <li><a href="https://www.bnl.gov/physics/">Physics</a> <li><a href="https://www.bnl.gov/riken/">RIKEN BNL Research Center</a> </ul> <ul class="responsiveLinkList2"> <li><a href="https://www.bnl.gov/ec/">Electron-Ion Collider</a> </ul> </div> <div class="grid_4"> <a class="closeGD menuClose" href="javascript:void(0);" title="Close Department List"><span class="fa-stack fa-lg"> <i class="fa fa-square-o fa-stack-2x"></i> <i class="fa fa-close fa-stack-1x"></i> </span></a> <ul class="responsiveLinkList2"> <li><a href="https://www.bnl.gov/advtech/">Discovery Technologies</a> <li><a href="https://www.bnl.gov/advtech/ast/">Accelerator Science & Tech</a> <li><a href="https://www.bnl.gov/instrumentation/">Instrumentation</a> <li><a href="javascript:void(0);" onclick="alert('Website coming soon.');">Microelectronics</a> <li><a href="javascript:void(0);" onclick="alert('Website coming soon.');">Quantum Information Science & Technology</a> </ul> <ul class="responsiveLinkList2"> <li> <a href="https://www.bnl.gov/bnlweb/admin/support.php">Support Orgs</a> | <a href="https://www.bnl.gov/bnlweb/admin/deptcodes.php">Dept. Codes</a> </ul> </div>  </div> </div><div class="gd" id="gd-8"> <div class="container_24"> <div class="grid_10 prefix_1 suffix_1"> <form class="homePageSearchForm webSearchForm" method="post" action="https://www.bnl.gov/search/"> <span class="fa fa-globe fa-3x"></span><div> <input class="BNLinput webSearchField" name="q1" type="text" value="" maxlength="256" autocomplete="off" placeholder="Web Search..."> <input type="hidden" name="DIRECTORY_RESTRICT" value=""> <input type="hidden" name="SUBCOLLECTION" value="default_collection"> </div> </form> </div> <div class="grid_10 prefix_1"> <form class="homePageSearchForm peopleSearchForm" method="post" action="https://www.bnl.gov/search/"> <span class="fa fa-user fa-3x"></span><div> <input class="BNLinput peopleSearchField" name="q1" type="text" value="" maxlength="256" autocomplete="off" placeholder="People Search..."> <input type="hidden" name="DIRECTORY_RESTRICT" value=""> <input type="hidden" name="SUBCOLLECTION" value="people"> </div> </form> </div> <div class="grid_1"> <a class="closeGD menuClose" href="javascript:void(0);" title="Hide Search Fields"><span class="fa-stack fa-lg"> <i class="fa fa-square-o fa-stack-2x"></i> <i class="fa fa-close fa-stack-1x"></i> </span></a> </div> </div> </div> <div class="clear"></div><div id="stripe"> <div class="container_24" id="banner"> <div class="grid_24" > <span id="hamburger" class="fa fa-bars"></span> <span id="mobileSearchTrigger" class="fa fa-search"></span> <a id="bnlLogoLink" title="BNL Homepage" href="https://www.bnl.gov"> <img class="BNLlogo black" title="BNL Homepage" src="/assets/global/images/bnl-logo-2021.svg" /> <img class="BNLlogo white-gray" title="BNL Homepage" src="/assets/global/images/bnl-logo-white-2021.svg" /> </a> <div id="siteTitleContainer">Instrumentation Department<span class="small"></span></div> <div id="bs-blurb">Creating customized solutions to instrumentation challenges—from detectors probing for fundamental particles created in the formation of the universe to quantum networks for the internet of the future. Part of Brookhaven National Lab's Advanced Technology Research Office.</div> <div id="doeLogoContainer"> <a id="doeLogoLink" title="DOE Office of Science" href="http://science.energy.gov/"> <img class="DOElogo black" title="DOE Office of Science" src="/assets/global/images/logo-doe-black-200px.png" /> <img class="DOElogo white" title="DOE Office of Science" src="/assets/global/images/logo-doe-white-500px.png" /> </a> </div> </div> </div> </div> <div class="container_24" id="siteMenuContainer"> <div class="grid_24"> <ul id="siteMenu"> <li><a href="https://www.bnl.gov/instrumentation/">Home</a> <li> <a href="#">Sensors</a> <ul> <li><a href="https://www.bnl.gov/instrumentation/sensors/">Overview</a> <li><a href="https://www.bnl.gov/instrumentation/sensors/silicon-sensors.php">Silicon</a> <li><a href="https://www.bnl.gov/instrumentation/sensors/germanium.php">Germanium</a></li> <li><a href="https://www.bnl.gov/instrumentation/sensors/diamond.php">Diamond</a></li> <li><a href="https://www.bnl.gov/instrumentation/sensors/semiconductor-detectors.php">Room-temp. Semiconductors</a><li> <li><a href="https://www.bnl.gov/instrumentation/sensors/noble-liquid-gas.php">Noble Liquids and Gases</a></li> <li><a href="https://www.bnl.gov/instrumentation/sensors/liquid-scintillators.php">Liquid Scintillators</a></li> </ul> <li> <a href="#">Integrated Electronics</a> <ul> <li><a href="https://www.bnl.gov/instrumentation/integrated/">Overview</a> <li><a href="https://www.bnl.gov/instrumentation/integrated/asic.php">ASICs</a> <li><a href="https://www.bnl.gov/instrumentation/integrated/signal-processing.php">Signal Processing</a> <li><a href="https://www.bnl.gov/instrumentation/integrated/daq-control.php">DAQ and Control Systems</a> <li><a href="https://www.bnl.gov/instrumentation/integrated/cad-pcb.php">Printed Circuit Boards</a> <li><a href="https://www.bnl.gov/instrumentation/integrated/hd-interconnects.php">High-Density Interconnects</a> </ul> <li> <a href="#">System Development</a> <ul> <li><a href="https://www.bnl.gov/instrumentation/sysdev/">Overview</a> <li><a href="https://www.bnl.gov/instrumentation/sysdev/mechanical-engineering.php">Mechanical Engineering, Fabrication & Integration</a> <li><a href="https://www.bnl.gov/instrumentation/sysdev/electronics-assembly.php">Electrical Engineering & Systems Integration</a> <li><a href="https://www.bnl.gov/instrumentation/sysdev/quantum-systems.php">Quantum Systems</a> <li><a href="https://www.bnl.gov/instrumentation/sysdev/source-development.php">Electron Source Development</a> <li><a href="https://www.bnl.gov/instrumentation/sysdev/laser-lab.php">Laser System Development</a> </ul> <li> <a href="#">Facilities & Infrastructure</a> <ul> <li><a href="https://www.bnl.gov/instrumentation/facilities/">Overview</a> <li><a href="https://www.bnl.gov/instrumentation/quantum/">Quantum Network Facility</a> <li><a href="https://www.bnl.gov/instrumentation/facilities/cleanroom.php">Fabrication Cleanrooms</a> <li><a href="https://www.bnl.gov/instrumentation/facilities/irradiation-facility.php">Irradiation Sources</a> <li><a href="https://www.bnl.gov/instrumentation/facilities/nanofabrication-lab.php">Micro/Nanofabrication Lab</a> <li><a href="https://www.bnl.gov/instrumentation/facilities/spectrum-mgmt.php">Spectrum Management Capabilities</a> </ul> <li><a href="https://www.bnl.gov/instrumentation/publications.php">Publications</a> </ul> </div> </div> <div class="themeBanner"> <div class="themeBannerText"> <h1>Facilities and Infrastructure</h1> </div> </div> <div class="container_24 lessTopPad">  <div class="grid_24"> <ul id="subnav"> <li><a href="index.php" ><i class="fa fa-lg fa-home"></i>Home</a> <li><a href="/instrumentation/quantum/">Quantum Network Facility</a> <li><a href="cleanroom.php" class='disabled'>Fabrication Cleanrooms</a> <li><a href="irradiation-facility.php" > Irradiation Sources</a> <li><a href="nanofabrication-lab.php" >Micro/Nanofabrication Lab</a> <li><a href="spectrum-mgmt.php" >Spectrum Mgmt. Capabilities</a> </ul> </div> <div class="grid_15 suffix_1" style="margin-bottom:2em;"> <h2>Fabrication Cleanrooms</h2> <p class="font-plus-2">For more than 20 years, the Silicon Sensor Fabrication Cleanroom in Brookhaven Lab鈥檚 Instrumentation Department has been a main center for the development and production of prototype silicon (Si) radiation sensors. These in-house-developed sensors are being used across the nation and abroad in fields including nuclear and high-energy physics, photon science, and x-ray astronomy. </p> <h3>Our Capabilities</h3> <ul> <li>Application of standard cleanroom techniques, including oxidation and annealing of 4-inch and 6-inch Si wafers with high-temperature furnaces, chemical removal of materials via wet etching, reactive-ion etching, double-sided lithography, sputtering, and rapid thermal processing </li> <li>Customization of sensor designs and technology process flows based on application specifications </li> <li>Creation of arbitrarily shaped sensors from wafers for specific application needs </li> <li>Evaluation of wafers at high voltages while collecting high-accuracy low-current-level measurements </li> <li>Collaboration with on-site cleanrooms containing additional processing capabilities, including one dedicated to germanium processing in Brookhaven鈥檚 Physics Department and another at the Center for Functional Nanomaterials that can be used for dielectric film depositions and other processes </li> </ul> </div> <div class="grid_8"> <div class="sidebar"> <img alt="photo of BNL designed wafer" src="../images/facilities/oxidation.jpg"> <p>Loading of Si wafers into a furnace for high-temperature annealing and oxidation.</p> </div> </div> </div> <div class="caseStudies"> <div class="container_24"> <div class="grid_24"> <h2>Case Studies</h2> </div> <div class="grid_8"> <h3>Si Pixel and Strip Sensors</h3> <img class="fwd fwm" alt="photo of silicon sensor wafer" src="../images/facilities/pixel-and-strip.jpg" /> <p class="caption">A 4-inch wafer of silicon strips and pixels for photon science experiments. </p> <p>For photon science and other applications requiring x-ray and charged-particle detection, we developed Si pixel and strip sensors. The Si pixel sensors have been incorporated into the Vertically Integrated Photon Imaging Chip and Hyperspectral Energy X-ray Resolving Imaging Detector, both under development at Brookhaven鈥檚 National Synchrotron Light Source II (NSLS-II). The Si strip sensors are supporting x-ray scattering and diffraction experiments at various x-ray synchrotrons, including NSLS-II, the Canadian Light Source, and the Cornell High Energy Synchrotron Source.</p> </div> <div class="grid_8"> <h3>Maia Microprobe Pad Sensor</h3> <img class="fwd fwm" alt="photo of Maia silicon wafer" src="../images/facilities/maia.jpg" /> <p class="caption">A 6-inch Si wafer of Maia, a 384-channel array of Si diodes for high-rate spectroscopy at synchrotrons.</p> <p>Our Si pad sensor array for the Maia x-ray microprobe is enabling the high-rate detection of fluorescence x-rays in synchrotron beamlines used for studies in environmental science, biology, nanoscience, and other fields. </p> </div> <div class="grid_8"> <h3>Low-gain Avalanche Diodes </h3> <img class="fwd fwm" alt="photo of LGAD silicon wafer" src="../images/facilities/lgad.jpg" /> <p class="caption">A 4-inch silicon wafer populated with LGADs of different sizes.</p> <p>Our group is one of the few around the world that is developing low-gain avalanche diodes (LGADs), and we are among the first to develop AC-coupled LGADs. Exploiting large signals and fast timing, these sensors could support the detection of soft x-rays for photon science experiments and high-precision measurements of particle arrival times for high-energy physics experiments, including <a href="https://atlas.cern" target="_blank">ATLAS</a> and CMS at CERN. </p> </div>  </div> </div> </div> <div id="topOfPage"><span class="fa fa-chevron-circle-up fa-lg topOfPageTrigger"></span></div> <div class="footer" id="footer" > <div class="container_24"> <div class="grid_6"> <h3 id="BNL">Brookhaven National Laboratory</h3> <p>PO Box 5000<br/> Upton, NY 11973-5000<br/> (631) 344-8000</p> <p><a id="contactUs" class="extrasmall white button" href="https://www.bnl.gov/contact-us/">Contact us</a></p> <ul class="socialMediaIcons"> <li><a target="_blank" href="https://twitter.com/BrookhavenLab" title="Follow Us on 𝕏"><i class="fa-brands fa-square-x-twitter fa-2x"></i></a> <li><a target="_blank" href="https://www.facebook.com/brookhavenlab" title="Follow Us on Facebook"><span class="fa fa-facebook-square fa-2x"></span></a> <li><a target="_blank" href="https://www.instagram.com/brookhavenlab/" title="Follow Us on Instagram"><span class="fa fa-instagram fa-2x"></span></a> <li><a target="_blank" href="https://www.linkedin.com/company/brookhavenlab/" title="Follow Us on LinkedIn"><span class="fa fa-linkedin-square fa-2x"></span></a> <li><a target="_blank" href="https://www.youtube.com/BrookhavenLab" title="Follow Us on YouTube"><span class="fa fa-youtube-square fa-2x"></span></a> <li><a target="_blank" href="http://www.flickr.com/brookhavenlab/" title="Follow Us on Flickr"><span class="fa fa-flickr fa-2x"></span></a> </ul> </div> <div class="grid_3"> <ul class="linkList2"> <li><a href="https://www.bnl.gov/science/">Our Science</a></li> <li><a href="https://www.bnl.gov/about/">About</a></li> <li><a href="https://www.bnl.gov/about/history/">History</a></li> <li><a href="https://www.bnl.gov/about/org/">Leadership</a></li> <li><a href="https://www.bnl.gov/visiting/">Visiting the Lab</a></li> <li><a href="https://www.bnl.gov/siteindex/">Site Index</a></li> <li><a href="https://www.bnl.gov/directory/">Staff Directory</a></li> </ul> </div> <div class="grid_3"> <ul class="linkList2"> <li><a target="_blank" href="https://jobs.bnl.gov/">Careers</a></li> <li><a href="https://www.bnl.gov/science/facilities.php">Facilities</a></li> <li><a href="https://www.bnl.gov/guv/">Guest Center</a></li> <li><a href="https://www.bnl.gov/partner/">Partnerships</a></li> <li><a href="https://www.bnl.gov/ppm/">For Vendors</a></li> <li><a id="deptLink" href="javascript:void(0);">Departments</a></li> <li><a href="https://www.bnl.gov/visiting/events/">Public Events</a></li> </ul> </div> <div class="grid_4"> <ul class="linkList2 lastList"> <li><a href="https://www.bnl.gov/diversity/">Diversity, Equity & Inclusion</a></li> <li><a href="https://www.bnl.gov/techtransfer/">Technology Licensing</a></li> <li><a href="https://www.bnl.gov/externalaffairs/">Stakeholder Relations</a></li> <li><a href="https://www.bnl.gov/education/">Students & Educators</a></li> <li><a href="https://www.bnl.gov/about/sustainability/">Sustainability</a></li> <li><a href="https://www.bnl.gov/privacy/">Privacy and Security Notice</a></li> <li><a target="_blank" href="https://doe.responsibledisclosure.com/hc/en-us">Vulnerability Disclosure Program</a></li> </ul> </div> <div class="grid_7 prefix_1"> <h3 id="BSA">Brookhaven Science Associates</h3> <p>Brookhaven Science Associates manages and operates Brookhaven National Laboratory on behalf of the U.S. Department of Energy's Office of Science. BSA is a partnership between Battelle and The Research Foundation for the State University of New York on behalf of Stony Brook University. | <a href="https://www.bnl.gov/about/bsa.php">More</a></p> <img id="bsaFooterLogo" alt="BSA logos" src="/assets/global/images/logo-bsa-black-220px.png"> </div> <div class="clear"></div> </div> </div><script src='/common/jquery/jquery/latest/jquery.js'></script> <script src='/common/jquery/jquery-ui/latest/jquery-ui.min.js'></script> <script src='/common/jquery/cookie/latest/jquery.cookie.js'></script> <script src='/common/jquery/sidr/latest/jquery.sidr.min.js'></script> <script src='/common/jquery/finger/latest/dist/jquery.finger.min.js'></script> <script src='/assets/global/js/bnl.js?v=2.2'></script> </body> </html>