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xmlns="http://www.w3.org/2000/svg"> <path fill-rule="evenodd" clip-rule="evenodd" d="M4.29919 18V6C4.29919 4.61929 5.41848 3.5 6.79919 3.5H11.7992H13.4413C13.7192 3.5 13.9922 3.54628 14.25 3.63441V7C14.25 8.51878 15.4812 9.75 17 9.75H19.2992V12V18C19.2992 19.3807 18.1799 20.5 16.7992 20.5H6.79919C5.41848 20.5 4.29919 19.3807 4.29919 18ZM18.9149 8.25C18.8305 8.11585 18.7329 7.98916 18.623 7.87194L15.75 4.80733V7C15.75 7.69036 16.3096 8.25 17 8.25H18.9149ZM2.79919 6C2.79919 3.79086 4.59006 2 6.79919 2H11.7992H13.4413C14.5469 2 15.6032 2.45763 16.3594 3.26424L19.7173 6.84603C20.4124 7.58741 20.7992 8.56555 20.7992 9.58179V12V18C20.7992 20.2091 19.0083 22 16.7992 22H6.79919C4.59006 22 2.79919 20.2091 2.79919 18V6ZM7.04919 12C7.04919 11.5858 7.38498 11.25 7.79919 11.25H15.7992C16.2134 11.25 16.5492 11.5858 16.5492 12C16.5492 12.4142 16.2134 12.75 15.7992 12.75H7.79919C7.38498 12.75 7.04919 12.4142 7.04919 12ZM7.79919 16.25C7.38498 16.25 7.04919 16.5858 7.04919 17C7.04919 17.4142 7.38498 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19.4863 1.37686ZM7 6.49996H16.6319L14.6964 8.43547C14.4035 8.72837 14.4035 9.20324 14.6964 9.49613C14.9893 9.78903 15.4641 9.78903 15.757 9.49613L18.3547 6.89846C19.0438 7.34362 19.5 8.11852 19.5 8.99996V19C19.5 20.3807 18.3807 21.5 17 21.5H7C5.61929 21.5 4.5 20.3807 4.5 19V8.99996C4.5 7.61924 5.61929 6.49996 7 6.49996ZM9.25 12C9.25 11.5857 9.58579 11.25 10 11.25H12H14C14.4142 11.25 14.75 11.5857 14.75 12C14.75 12.4142 14.4142 12.75 14 12.75H12H10C9.58579 12.75 9.25 12.4142 9.25 12ZM9.25 17C9.25 16.5857 9.58579 16.25 10 16.25H12H14C14.4142 16.25 14.75 16.5857 14.75 17C14.75 17.4142 14.4142 17.75 14 17.75H12H10C9.58579 17.75 9.25 17.4142 9.25 17Z" fill="currentColor"/> </svg> Аннотация</a>Аннотация<a href="/c/khimicheskoe-osazhdenie-iz-gazovoi-fazy-9015b5/annotation" class="bre-article-menu__list-item tw-mx-auto tw-flex lg:tw-hidden"><svg viewBox="0 0 24 24" fill="none" xmlns="http://www.w3.org/2000/svg"> <path fill-rule="evenodd" clip-rule="evenodd" d="M18.2363 4.12686C18.2363 3.43651 18.796 2.87686 19.4863 2.87686C20.1767 2.87686 20.7363 3.43651 20.7363 4.12686C20.7363 4.81722 20.1767 5.37686 19.4863 5.37686C18.796 5.37686 18.2363 4.81722 18.2363 4.12686ZM19.4863 1.37686C17.9675 1.37686 16.7363 2.60808 16.7363 4.12686C16.7363 4.43206 16.786 4.72564 16.8778 4.99996H7C4.79086 4.99996 3 6.79082 3 8.99996V19C3 21.2091 4.79086 23 7 23H17C19.2091 23 21 21.2091 21 19V8.99996C21 8.16642 20.745 7.39244 20.3089 6.75173C21.4258 6.40207 22.2363 5.35911 22.2363 4.12686C22.2363 2.60808 21.0051 1.37686 19.4863 1.37686ZM7 6.49996H16.6319L14.6964 8.43547C14.4035 8.72837 14.4035 9.20324 14.6964 9.49613C14.9893 9.78903 15.4641 9.78903 15.757 9.49613L18.3547 6.89846C19.0438 7.34362 19.5 8.11852 19.5 8.99996V19C19.5 20.3807 18.3807 21.5 17 21.5H7C5.61929 21.5 4.5 20.3807 4.5 19V8.99996C4.5 7.61924 5.61929 6.49996 7 6.49996ZM9.25 12C9.25 11.5857 9.58579 11.25 10 11.25H12H14C14.4142 11.25 14.75 11.5857 14.75 12C14.75 12.4142 14.4142 12.75 14 12.75H12H10C9.58579 12.75 9.25 12.4142 9.25 12ZM9.25 17C9.25 16.5857 9.58579 16.25 10 16.25H12H14C14.4142 16.25 14.75 16.5857 14.75 17C14.75 17.4142 14.4142 17.75 14 17.75H12H10C9.58579 17.75 9.25 17.4142 9.25 17Z" fill="currentColor"/> </svg> Аннотация</a></div><div class="tw-grow tw-basis-0 max-md:tw-max-w-[80px]"><a href="/c/khimicheskoe-osazhdenie-iz-gazovoi-fazy-9015b5/media" class="bre-article-menu__list-item"><svg viewBox="0 0 24 24" fill="none" xmlns="http://www.w3.org/2000/svg"> <path fill-rule="evenodd" clip-rule="evenodd" d="M17 4H7C5.61929 4 4.5 5.11929 4.5 6.5V17.5C4.5 18.1033 4.71367 18.6566 5.06946 19.0885L15.6829 8.95748C15.8374 8.81003 16.0474 8.73542 16.2603 8.75237C16.4732 8.76931 16.6687 8.87621 16.7979 9.04625L19.5 12.6023V6.5C19.5 5.11929 18.3807 4 17 4ZM19.5 15.0592C19.465 15.0278 19.4324 14.9926 19.4028 14.9538L16.1114 10.6221L6.37067 19.9201C6.57173 19.9723 6.78263 20 7 20H17C18.3807 20 19.5 18.8807 19.5 17.5V15.0592ZM7 2.5C4.79086 2.5 3 4.29086 3 6.5V17.5C3 19.7091 4.79086 21.5 7 21.5H17C19.2091 21.5 21 19.7091 21 17.5V6.5C21 4.29086 19.2091 2.5 17 2.5H7ZM9.20078 7.25C8.51042 7.25 7.95078 7.80964 7.95078 8.5C7.95078 9.19036 8.51042 9.75 9.20078 9.75C9.89113 9.75 10.4508 9.19036 10.4508 8.5C10.4508 7.80964 9.89113 7.25 9.20078 7.25ZM6.45078 8.5C6.45078 6.98122 7.68199 5.75 9.20078 5.75C10.7196 5.75 11.9508 6.98122 11.9508 8.5C11.9508 10.0188 10.7196 11.25 9.20078 11.25C7.68199 11.25 6.45078 10.0188 6.45078 8.5Z" fill="currentColor"/> </svg> Медиа</a>Медиа<a href="/c/khimicheskoe-osazhdenie-iz-gazovoi-fazy-9015b5/media" class="bre-article-menu__list-item tw-mx-auto tw-flex lg:tw-hidden"><svg viewBox="0 0 24 24" fill="none" xmlns="http://www.w3.org/2000/svg"> <path fill-rule="evenodd" clip-rule="evenodd" d="M17 4H7C5.61929 4 4.5 5.11929 4.5 6.5V17.5C4.5 18.1033 4.71367 18.6566 5.06946 19.0885L15.6829 8.95748C15.8374 8.81003 16.0474 8.73542 16.2603 8.75237C16.4732 8.76931 16.6687 8.87621 16.7979 9.04625L19.5 12.6023V6.5C19.5 5.11929 18.3807 4 17 4ZM19.5 15.0592C19.465 15.0278 19.4324 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9.07607H16.3118L14.3152 6.68014ZM6.72827 13.3043C6.72827 12.8901 7.06406 12.5543 7.47827 12.5543H14.4348C14.849 12.5543 15.1848 12.8901 15.1848 13.3043C15.1848 13.7185 14.849 14.0543 14.4348 14.0543H7.47827C7.06406 14.0543 6.72827 13.7185 6.72827 13.3043ZM7.47827 16.9022C7.06406 16.9022 6.72827 17.238 6.72827 17.6522C6.72827 18.0664 7.06406 18.4022 7.47827 18.4022H10.9565C11.3707 18.4022 11.7065 18.0664 11.7065 17.6522C11.7065 17.238 11.3707 16.9022 10.9565 16.9022H7.47827Z" fill="currentColor"/> </svg> Версии</a></div></div></div></nav><div><meta itemprop="image primaryImageOfPage" content="https://i.bigenc.ru/resizer/resize?sign=_oZGNMT12w20jVMCGLd7_Q&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=120"><article itemscope itemprop="mainEntity" itemtype="https://schema.org/Article"><div itemprop="publisher" itemscope itemtype="https://schema.org/Organization"><meta itemprop="name" content="Автономная некоммерческая организация «Национальный научно-образовательный центр 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md:max-lg:tw-mt-[81px] max-md:tw-mt-[105px]"><nav class="bre-article-loc -hide-on-desktop-s"><div class="bre-article-loc-button">Содержание<svg viewBox="0 0 24 24" fill="none" xmlns="http://www.w3.org/2000/svg"><path d="M6 9l6 6 6-6" stroke="currentColor" stroke-width="1.5" stroke-linecap="round"/></svg> <div class="bre-article-loc-short">История развития CVD-метода</div></div></nav><div class="article-sidebar -hide-on-desktop-s"><div class="article-sidebar-button -show-on-tablet -hide-on-desktop-s">Информация<svg viewBox="0 0 24 24" fill="none" xmlns="http://www.w3.org/2000/svg"><path d="M6 9l6 6 6-6" stroke="currentColor" stroke-width="1.5" stroke-linecap="round"/></svg> <div class="article-sidebar-text -show-on-tablet -hide-on-desktop-s">Химическое осаждение из газовой фазы</div></div><div class="article-sidebar-wrapper -hide-on-tablet"><header class="bre-article-header -hide-on-tablet"><div class="bre-label__wrap"><a href="/t/chemical_processes" class="bre-label _link">Химические процессы</a>Химические процессы</div><h1 class="bre-article-header-title">Химическое осаждение из газовой фазы</h1></header><section class="-hide-on-tablet tw-h-14 md:tw-h-20"></section><meta itemprop="name" content="Химия"><meta itemprop="caption" content="Химия. Научно-образовательный портал «Большая российская энциклопедия»"><img src="https://i.bigenc.ru/resizer/resize?sign=_oZGNMT12w20jVMCGLd7_Q&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=120" onerror="this.setAttribute('data-error', 1)" alt="Химия" data-nuxt-img sizes="320px" srcset="https://i.bigenc.ru/resizer/resize?sign=_oZGNMT12w20jVMCGLd7_Q&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=120 120w,https://i.bigenc.ru/resizer/resize?sign=Mj7syzY4qsowwDnbvl7INQ&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=320 320w,https://i.bigenc.ru/resizer/resize?sign=WBHjuP_BJC6NzjbzS170zA&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=480 480w,https://i.bigenc.ru/resizer/resize?sign=E2zfLZmy9Ma2FS3Az9fIbQ&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=640 640w,https://i.bigenc.ru/resizer/resize?sign=ds7dpUugUbRfiPjQK9-nfw&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=768 768w,https://i.bigenc.ru/resizer/resize?sign=-BIt-K0CauiCHnEQiykBBQ&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=1024 1024w,https://i.bigenc.ru/resizer/resize?sign=57YV3LcckQbWzGa4yj4hIA&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=1280 1280w,https://i.bigenc.ru/resizer/resize?sign=1mJ4dHRO7wNCrvaAwb3lOw&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=1920 1920w" title="Химия" class="" itemprop="contentUrl"><div class="article-sidebar-meta"><dl class="tw-mt-0"><dt>Области знаний:</dt><dd>Неорганическая химия, Химическая технология</dd></dl></div></div></div><div class="bre-article-page__container"><div class="bre-article-page__content bre-article-content"><header class="bre-article-header -show-on-tablet"><div class="bre-label__wrap"><a href="/t/chemical_processes" class="bre-label _link">Химические процессы</a>Химические процессы</div><h1 class="bre-article-header-title">Химическое осаждение из газовой фазы</h1></header><section class="tw-flex"><div class="-show-on-tablet tw-h-14 md:tw-h-20"><div><div><div itemprop="interactionStatistic" itemscope itemtype="https://schema.org/InteractionCounter"><meta itemprop="interactionType" content="https://schema.org/ViewAction"><meta itemprop="userInteractionCount" content=""></div><div itemprop="interactionStatistic" itemscope itemtype="https://schema.org/InteractionCounter"><meta itemprop="interactionType" content="https://schema.org/ShareAction"><meta itemprop="userInteractionCount" content=""></div><div itemprop="interactionStatistic" itemscope itemtype="https://schema.org/InteractionCounter"><meta itemprop="interactionType" content="https://schema.org/LikeAction"><meta itemprop="userInteractionCount" content=""></div></div></div></div></section><div class="js-preview-link-root"><div itemprop="articleBody" class="bre-article-body"><section><section>Хими́ческое осажде́ние из га́зовой фа́зы (англ. Chemical vapor deposition, CVD-метод), метод осаждения на подложке твёрдого вещества из газообразных или парообразных <a href="/c/prekursor-5522c6" class="bre-preview-link" itemprop="url" data-external="false">прекурсоров</a> посредством <a href="/c/khimicheskie-reaktsii-96aef8" class="bre-preview-link" itemprop="url" data-external="false">химической реакции</a>. Поскольку реакция должна проходить в газовой фазе, то исходные компоненты необходимо предварительно испарить, если при нормальных условиях они находятся в жидком или твёрдом агрегатных состояниях. В ходе процесса CVD образуется твёрдое вещество в качестве основного продукта, а побочные продукты должны быть газообразными, чтобы их легко можно было удалить из реакционной среды.Отличительной особенностью CVD-метода является послойное нанесение покрытий и плёнок, которые равномерно покрывают всю доступную поверхность подложки. CVD-методом могут быть получены кристаллы или порошки. В случае порошков, реакция осаждения происходит в объёме газовой фазы, а не на поверхности подложки. С помощью данного метода можно получить синтетические соединения в виде мелкодисперсного порошка вплоть до наночастиц.Существует два типа реакторов для проведения CVD-синтеза: реакторы с горячей стенкой, в которых камера окружена печью, нагревающей систему, и реакторы с холодной стенкой, в которых нагревается сама подложка.<h2 id="h2_istoriya_razvitiya_cvd-metoda">История развития CVD-метода</h2>CVD-метод в его современном виде получил развитие в 1950-х гг. В то время технология CVD в основном применялась для нанесения покрытий на режущие инструменты, что было связано с развитием машиностроения в Европе. Нанесение покрытий из Al2O3, TiC и TiN на режущие инструменты из <a href="/c/splavy-metallov-db4c2d" class="bre-preview-link" itemprop="url" data-external="false">сплавов</a> на основе <a href="/c/karbidy-vol-frama-9f7c36" class="bre-preview-link" itemprop="url" data-external="false">карбида вольфрама</a> приводит к увеличению прочности, производительности резки и срока службы устройств. Первые покрытия из TiC на стальной подложке были получены Ф. Х. Поллардом, Ф. Вудвордом в 1950 г. и А. Мюнстером, В. Руппертом в 1953 г. В 1967 г. Д. М. Блокер предложил разделить методы осаждения из газовой фазы на два типа: физическое осаждение, при котором вещество образуется в ходе физической <a href="/c/kondensatsiia-962c86" class="bre-preview-link" itemprop="url" data-external="false">конденсации</a> газа, и химическое осаждение, при котором вещество образуется из газовой фазы в результате химической реакции.В 1960–1970-х гг. CVD-метод получил широкое распространение благодаря исследованию и производству <a href="/c/poluprovodniki-cf5385" class="bre-preview-link" itemprop="url" data-external="false">полупроводников</a> и <a href="/c/integral-naia-skhema-416867" class="bre-preview-link" itemprop="url" data-external="false">интегральных схем</a>. Технология CVD для получения сверхчистого <a href="/c/polikristallicheskii-kremnii-26d957" class="bre-preview-link" itemprop="url" data-external="false">поликристаллического кремния</a> стала основным способом производства полупроводникового материала для промышленности. Производство эпитаксиального монокристаллического <a href="/c/arsenid-galliia-1125e2" class="bre-preview-link" itemprop="url" data-external="false">арсенида галлия</a> и других полупроводников также было основано на технологии CVD. В 1990‑х гг. был разработан CVD-метод для получения Al2O3 путём послойного нанесения <a href="/c/atom-8fe711" class="bre-preview-link" itemprop="url" data-external="false">атомов</a> <a href="/c/aliuminii-c3b537" class="bre-preview-link" itemprop="url" data-external="false">алюминия</a> и <a href="/c/kislorod-a7f0c3" class="bre-preview-link" itemprop="url" data-external="false">кислорода</a>, который позволил создавать миниатюрные полупроводниковые интегральные схемы.В 1976 г. Б. В. Дерягиным и его коллегами разработан CVD-метод для синтеза <a href="/c/almaz-48db34" class="bre-preview-link" itemprop="url" data-external="false">алмаза</a>, который в 1980-х гг. получил широкое распространение по всему миру. Данный метод позволил получать искусственные алмазы при низком давлении, что до этого считалось термодинамически невозможным. В 21 в. благодаря усилиям Янь Чжи-Шию и его коллег стало возможным получение монокристаллического алмаза в 15 карат.<h2 id="h2_osnovnыe_tipы_reaktsii,_ispol'zuemыh_v_cvd-metode">Основные типы реакций, используемых в CVD-методе</h2><h3 id="h3_piroliz">Пиролиз</h3>В результате <a href="/c/piroliz-49311f" class="bre-preview-link" itemprop="url" data-external="false">пиролиза</a> <a href="/c/gidridy-d98659" class="bre-preview-link" itemprop="url" data-external="false">гидриды</a> CH4, SiH4, GeH4, B2H6, PH3, AsH3 и другие, которые представляют собой газообразные соединения, легко разлагаются с образованием соответствующих элементов и <a href="/c/vodorod-7c381b" class="bre-preview-link" itemprop="url" data-external="false">водорода</a>. CH4 и SiH4 разлагаются при температурах 600–1200 °C с образованием твёрдых плёнок. GeH4 в смеси с SiH4 после пиролиза при 550–800 °C образуют плёнку, представляющую собой Si-Ge сплав. <a href="/c/alkogoliaty-702ce0" class="bre-preview-link" itemprop="url" data-external="false">Алкоголяты</a> [Al(OC3H7)3, Si(OC2H5)4] неустойчивы при высокой температуре и в результате пиролиза разлагаются с образованием <a href="/c/oksidy-098457" class="bre-preview-link" itemprop="url" data-external="false">оксидов</a> (Al2O3, SiO2). Некоторые <a href="/c/karbonil-nye-soedineniia-f3fd00" class="bre-preview-link" itemprop="url" data-external="false">карбонильные соединения</a> металлов [Ni(CO)4, Pt(CO)2Cl2] являются газами или легко испаряются, в результате их пиролиза образуется металлическая плёнка и выделяется CO.<h3 id="h3_okislitel'no-vosstanovitel'nыe_reaktsii">Окислительно-восстановительные реакции</h3>В качестве прекурсоров используют гидриды или алкильные соединения, которые представляют собой газы, жидкости или легколетучие твёрдые вещества. При их реакции с кислородом осаждаются плёнки оксидов соответствующих элементов. Например, в ходе реакции SiH4 с кислородом воздуха осаждается SiO2, а Al2(CH3)6 – Al2O3. Многие галогениды часто представляют собой газы или летучие вещества и в ходе реакции восстановления водородом образуют плёнки соответствующих элементов. Например, WF6 и SiCl4 восстанавливаются до W и Si. Восстановление трихлорсилана SiHCl3 водородом является основным способом промышленного получения полупроводникового сверхчистого кремния с чистотой свыше 99,9999999 %.<h3 id="h3_protsess_cvd_s_perenosom_massы">Процесс CVD с переносом массы</h3>Некоторые вещества, такие как сульфид ртути HgS, легко разлагаются на простые вещества Hg и S в газообразной фазе при температуре выше 220 °C. В ходе процесса CVD при переносе данных веществ в более холодную зону реактора происходит их взаимодействие и осаждение плёнки или кристалла HgS. CVD-метод применяется, чтобы значительно повысить температуру использования <a href="/c/vol-fram-84aa1f" class="bre-preview-link" itemprop="url" data-external="false">вольфрамовой</a> проволоки и срок службы галогенвольфрамовых ламп. Вблизи истончившейся части проволоки с более высокой температурой (~ 3000 °C) газообразный тетраиодид или тетрабромид вольфрама разлагается на простые вещества. Осаждающийся вольфрам восстанавливает проволоку, а <a href="/c/iod-f5fa0f" class="bre-preview-link" itemprop="url" data-external="false">иод</a> (или <a href="/c/brom-e1de19" class="bre-preview-link" itemprop="url" data-external="false">бром</a>) выделяется в газовую фазу. <h3 id="h3_protsess_cvd_s_uchastiem_plazmы">Процесс CVD с участием плазмы</h3>Из-за столкновений между положительными <a href="/c/iony-63f2be" class="bre-preview-link" itemprop="url" data-external="false">ионами</a> <a href="/c/plazma-0c9643" class="bre-preview-link" itemprop="url" data-external="false">плазмы</a> и нейтральными реакционными <a href="/c/molekula-de7079" class="bre-preview-link" itemprop="url" data-external="false">молекулами</a> температура осаждения из газовой фазы может значительно снизиться. Такой подход применяется в частном случае CVD-метода – плазменно-химическом осаждении из газовой фазы [Plasma enhanced chemical vapor deposition (PECVD)]. Например, реакция между <a href="/c/silany-7ae5b1" class="bre-preview-link" itemprop="url" data-external="false">силаном</a> и <a href="/c/ammiak-8708a6" class="bre-preview-link" itemprop="url" data-external="false">аммиаком</a> для осаждения <a href="/c/nitrid-kremniia-081e60" class="bre-preview-link" itemprop="url" data-external="false">нитрида кремния</a> обычно протекает при температуре около 850 °C, но в условиях реакции с плазмой образование нитрида кремния происходит при температуре около 350 °C, что позволяет снизить энергозатраты и увеличить производительность процесса.<h3 id="h3_posloinoe_osazhdenie_iz_gazovoi_fazы">Послойное осаждение из газовой фазы</h3>Получение плёнок оксида алюминия может осуществляться послойно путём последовательного нанесения атомов алюминия и кислорода. Триметилалюминий реагирует с гидроксильными группами на поверхности подложки с образованием одноатомного слоя алюминия, при этом выделяется <a href="/c/metan-54c13a" class="bre-preview-link" itemprop="url" data-external="false">метан</a> <math xmlns="http://www.w3.org/1998/Math/MathML"><semantics><mrow><mtext>–</mtext><mi>O</mi><mi>H</mi><mtext> </mtext><mo>+</mo><mtext> </mtext><mi>A</mi><mi>l</mi><mo stretchy="false">(</mo><mi>C</mi><msub><mi>H</mi><mn>3</mn></msub><msub><mo stretchy="false">)</mo><mn>3</mn></msub><mtext> </mtext><mo>=</mo><mtext> –</mtext><mi>O</mi><mtext>–</mtext><mi>A</mi><mi>l</mi><mo stretchy="false">(</mo><mi>C</mi><msub><mi>H</mi><mn>3</mn></msub><msub><mo stretchy="false">)</mo><mn>2</mn></msub><mtext> </mtext><mo>+</mo><mtext> </mtext><mi>C</mi><msub><mi>H</mi><mn>4</mn></msub></mrow><annotation encoding="application/x-tex">–OH + Al (CH_{3} )_{3} = –O–Al(CH_{3} )_{2} + C H_{4} </annotation></semantics></math>–OH + Al(CH3)3 = –O–Al(CH3)2 + CH4. Образующийся слой покрыт метильными группами, которые препятствуют нанесению ещё одного слоя алюминия. На следующем этапе в реакционную среду вводятся пары́ <a href="/c/voda-07375d" class="bre-preview-link" itemprop="url" data-external="false">воды</a>, которые являются прекурсором для атомов кислорода. Метильные группы на слое алюминия <a href="/c/gidroliz-80ea99" class="bre-preview-link" itemprop="url" data-external="false">гидролизуются</a> водой и выделяются в виде метана <math xmlns="http://www.w3.org/1998/Math/MathML"><semantics><mrow><mtext>–</mtext><mi>O</mi><mtext>–</mtext><mi>A</mi><mi>l</mi><mo stretchy="false">(</mo><mi>C</mi><msub><mi>H</mi><mn>3</mn></msub><msub><mo stretchy="false">)</mo><mn>2</mn></msub><mo>+</mo><mn>2</mn><msub><mi>H</mi><mn>2</mn></msub><mi>O</mi><mo>=</mo><mtext>–</mtext><mi>O</mi><mtext>–</mtext><mi>A</mi><mi>l</mi><mo stretchy="false">(</mo><mi>O</mi><mi>H</mi><msub><mo stretchy="false">)</mo><mn>2</mn></msub><mo>+</mo><mn>2</mn><mi>C</mi><msub><mi>H</mi><mn>4</mn></msub></mrow><annotation encoding="application/x-tex">–O–Al(C H_{3} )_{2} + 2H_{2}O = –O–Al (OH)_{2} + 2CH_{4}</annotation></semantics></math>–O–Al(CH3)2+2H2O=–O–Al(OH)2+2CH4. Образуется слой гидроксильных групп на поверхности, и последовательность реакций осаждения повторяется.<h2 id="h2_cvd-metod_dlya_polucheniya_uglerodnыh_materialov">CVD-метод для получения углеродных материалов</h2>CVD-метод является одним из способов получения углеродных материалов (алмаз, <a href="/c/grafit-88b736" class="bre-preview-link" itemprop="url" data-external="false">графит</a>) и <a href="/c/nanomaterialy-398cdc" class="bre-preview-link" itemprop="url" data-external="false">наноматериалов</a> (<a href="/c/fullereny-f5a9f9" class="bre-preview-link" itemprop="url" data-external="false">фуллерен</a>, <a href="/c/uglerodnye-nanotrubki-8b1fb1" class="bre-preview-link" itemprop="url" data-external="false">углеродные нанотрубки</a>, <a href="/c/grafen-352d1a" class="bre-preview-link" itemprop="url" data-external="false">графен</a>). Для выращивания алмазов CVD-методом используется метан в смеси с водородом. Углеродсодержащее сырьё разлагается при 2100 °C на нагревательном элементе из Mo, W или Ta и осаждается в виде алмаза при 900 °C на подложке из Si или Mo. CVD-метод используется для получения синтетического пиролитического графита путём пиролиза углеводородного прекурсора (метан, <a href="/c/propan-80e388" class="bre-preview-link" itemprop="url" data-external="false">пропан</a>) при температуре выше 1800 °C. Пиролитический графит обладает практически нулевой <a href="/c/poristost-uglerodnykh-materialov-165903" class="bre-preview-link" itemprop="url" data-external="false">пористостью</a> и плотностью, близкой к кристаллографической, ~ 2,2 г/см3.Для получения фуллеренов используют смеси водорода и метана или водорода и <a href="/c/atsetilen-1d4a89" class="bre-preview-link" itemprop="url" data-external="false">ацетилена</a>. Разложение компонентов сырья осуществляется за счёт нагревательного элемента при температуре 2000–2200 °C с последующим их осаждением на подложку при 950–1000 °C.В ходе получения углеродных нанотрубок CVD-методом происходит реакция термического <a href="/c/degidrirovanie-fd2b33" class="bre-preview-link" itemprop="url" data-external="false">дегидрирования</a> углеводородного сырья (ацетилен, <a href="/c/benzol-77569b" class="bre-preview-link" itemprop="url" data-external="false">бензол</a>, <a href="/c/tsiklogeksan-c1cfda" class="bre-preview-link" itemprop="url" data-external="false">циклогексан</a> и др.) и формирование из образующихся продуктов углеродных нанотрубок на подложке. Процесс происходит при сравнительно малых температурах 550–1000 °C. При этом на подложку нанесен <a href="/c/katalizatory-87ecad" class="bre-preview-link" itemprop="url" data-external="false">катализатор</a> на основе <a href="/c/perekhodnye-metally-eb4db3" class="bre-preview-link" itemprop="url" data-external="false">переходного металла</a> (Fe, Co, Ni), который используется для снижения температуры, необходимой для пиролиза газообразного углеводородного сырья.<meta itemprop="name" content="Схема установки для получения углеродных нанотрубок методом химического осаждения из газовой фазы"><meta itemprop="caption" content="Схема установки для получения углеродных нанотрубок методом химического осаждения из газовой фазы. Иллюстрация: Андрей Иванов."><img src="https://i.bigenc.ru/resizer/resize?sign=pLVf3Ll5K7LotcdNGfDDqA&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=120" onerror="this.setAttribute('data-error', 1)" alt="Схема установки для получения углеродных нанотрубок методом химического осаждения из газовой фазы" data-nuxt-img sizes="640px" srcset="https://i.bigenc.ru/resizer/resize?sign=pLVf3Ll5K7LotcdNGfDDqA&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=120 120w,https://i.bigenc.ru/resizer/resize?sign=MFjuqBiD0AQ7IOXt-YWIvA&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=320 320w,https://i.bigenc.ru/resizer/resize?sign=6CxtMejmkTD2ZCM3Do3AMA&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=480 480w,https://i.bigenc.ru/resizer/resize?sign=jrTBj5agOy6r3dE0lDr3PA&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=640 640w,https://i.bigenc.ru/resizer/resize?sign=kzn5yR9WIvEOusBYssZYHQ&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=768 768w,https://i.bigenc.ru/resizer/resize?sign=0c5A-MWIqWtqzvUqSTlTDw&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=1024 1024w,https://i.bigenc.ru/resizer/resize?sign=NdafJtFPLCYqsYcTOAwubg&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=1280 1280w,https://i.bigenc.ru/resizer/resize?sign=HP2LsXU4S1rAmV72DDwnWw&filename=vault/42aaa707d5c192933e083c809889ced0.webp&width=1920 1920w" title="Схема установки для получения углеродных нанотрубок методом химического осаждения из газовой фазы" class="" itemprop="contentUrl">Схема установки для получения углеродных нанотрубок методом химического осаждения из газовой фазы. Иллюстрация: Андрей Иванов.Схема установки для получения углеродных нанотрубок методом химического осаждения из газовой фазы. Иллюстрация: Андрей Иванов.Графен синтезируют CVD-методом путём осаждения из газовой смеси водорода и метана на поверхность металла-катализатора (Ni, Cu, Pt, Ir, Ru). В ходе синтеза возникает градиент концентрации атомов <a href="/c/uglerod-dc7cd3" class="bre-preview-link" itemprop="url" data-external="false">углерода</a> от объёма металла к его поверхности. Когда достигается насыщение в объёме, атомы углерода <a href="/c/diffuziia-a16018" class="bre-preview-link" itemprop="url" data-external="false">диффундируют</a> на поверхность металла с образованием графена. CVD-методом при 1000 °C и атмосферном давлении можно получить от 1 до 12 слоёв графена на <a href="/c/nikel-1fe557" class="bre-preview-link" itemprop="url" data-external="false">никелевой</a> плёнке. Разложение <a href="/c/etilen-f42620" class="bre-preview-link" itemprop="url" data-external="false">этилена</a> на <a href="/c/platina-7b5782" class="bre-preview-link" itemprop="url" data-external="false">платине</a> приводит к образованию одного слоя графена. При использовании <a href="/c/med-afe2ff" class="bre-preview-link" itemprop="url" data-external="false">меди</a> углерод не растворяется в её объёме, и графеновые слои образуются непосредственно на поверхности металла.<a href="/a/av-ivanov-e4f347" class="">Иванов Андрей Владимирович</a></section></section></div><meta itemprop="description" content="Хими́ческое осажде́ние из га́зовой фа́зы, метод осаждения на подложке твёрдого вещества из газообразных или парообразных прекурсоров посредством...">Опубликовано 8 июня 2022 г. в 14:19 (GMT+3). Последнее обновление 8 июня 2022 г. в 14:19 (GMT+3).<button type="button" class="b-button tw-gap-2 b-button--link -text-button-text tw-rounded-lg tw-cursor-pointer" data-v-cfbedafc>Связаться с редакцией</button></div></div><div class="bre-tags-wrap"><a href="/l/metody-polucheniia-materialov-8210a4" class="bre-article-tag bre-article-tag__link _default _no-border" data-v-063d9480>#Методы получения материалов</a><div class="bre-article-tag bre-article-tag__text _default _no-border" data-v-063d9480>#Химическая промышленность</div></div></div><aside class="bre-article-page__sidebar -show-on-desktop-s" style=""><nav class="bre-article-loc lg:tw-sticky"><div class="bre-article-loc-button">Содержание<svg viewBox="0 0 24 24" fill="none" xmlns="http://www.w3.org/2000/svg"><path d="M6 9l6 6 6-6" stroke="currentColor" stroke-width="1.5" stroke-linecap="round"/></svg> <div class="bre-article-loc-short">История развития CVD-метода</div></div></nav><div class="bre-article-page__sidebar-wrapper"><div class="article-sidebar"><div class="article-sidebar-button -show-on-tablet -hide-on-desktop-s">Информация<svg viewBox="0 0 24 24" fill="none" xmlns="http://www.w3.org/2000/svg"><path d="M6 9l6 6 6-6" stroke="currentColor" stroke-width="1.5" stroke-linecap="round"/></svg> <div class="article-sidebar-text -show-on-tablet -hide-on-desktop-s"></div></div><div class="article-sidebar-wrapper -hide-on-tablet"><meta itemprop="name" content="Химия"><meta itemprop="caption" content="Химия. Научно-образовательный портал «Большая российская энциклопедия»"><img src="https://i.bigenc.ru/resizer/resize?sign=_oZGNMT12w20jVMCGLd7_Q&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=120" onerror="this.setAttribute('data-error', 1)" alt="Химия" data-nuxt-img sizes="320px" srcset="https://i.bigenc.ru/resizer/resize?sign=_oZGNMT12w20jVMCGLd7_Q&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=120 120w,https://i.bigenc.ru/resizer/resize?sign=Mj7syzY4qsowwDnbvl7INQ&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=320 320w,https://i.bigenc.ru/resizer/resize?sign=WBHjuP_BJC6NzjbzS170zA&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=480 480w,https://i.bigenc.ru/resizer/resize?sign=E2zfLZmy9Ma2FS3Az9fIbQ&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=640 640w,https://i.bigenc.ru/resizer/resize?sign=ds7dpUugUbRfiPjQK9-nfw&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=768 768w,https://i.bigenc.ru/resizer/resize?sign=-BIt-K0CauiCHnEQiykBBQ&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=1024 1024w,https://i.bigenc.ru/resizer/resize?sign=57YV3LcckQbWzGa4yj4hIA&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=1280 1280w,https://i.bigenc.ru/resizer/resize?sign=1mJ4dHRO7wNCrvaAwb3lOw&filename=vault/168d4a6ed5bb2642309d953f369e1da6.webp&width=1920 1920w" title="Химия" class="" itemprop="contentUrl"><div class="article-sidebar-meta"><dl class="tw-mt-0"><dt>Области знаний:</dt><dd>Неорганическая химия, Химическая технология</dd></dl></div></div></div></div></aside></div></article></div></div><div></div></main><footer class="bre-footer" itemscope itemprop="hasPart" itemtype="https://schema.org/WPFooter"><meta itemprop="copyrightNotice" content="&copy;&nbsp;АНО БРЭ, 2022&nbsp;&mdash;&nbsp;2024. 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Свидетельство о регистрации СМИ ЭЛ № ФС77-84198, выдано Федеральной службой по надзору в сфере связи, информационных технологий и массовых коммуникаций (Роскомнадзор) 15 ноября 2022 года. ISSN: 2949-2076</li><li class="_footer-text bre-inline-menu__item">Учредитель: Автономная некоммерческая организация «Национальный научно-образовательный центр «Большая российская энциклопедия» Главный редактор: Кравец С. Л. 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Медиаконтент (иллюстрации, фотографии, видео, аудиоматериалы, карты, скан образы) может быть использован только с разрешения правообладателей.</li></ul></div></div></footer></div></div></div><script type="application/json" id="__NUXT_DATA__" data-ssr="true">[["Reactive",1],{"data":2,"state":3,"once":4,"_errors":5,"serverRendered":6,"path":7,"pinia":8},{},{"$sreferer":-1},["Set"],{},true,"/c/khimicheskoe-osazhdenie-iz-gazovoi-fazy-9015b5",{"preview":9,"auth-token":11,"search":14,"page-loading":19,"search-suggestions":20,"filters":23,"component-header":25,"collection":26,"article":27,"article-media-slider":1634,"modal":1648,"article-notes":1649,"article-loc":1650,"article-sidebar":1651,"author":1652,"article-metrics":1653,"collection-articles-favorite":1654,"article-collections":1655,"article-versions":1656,"error-form":1665,"text-selection":1666},{"get_":10,"getError":10,"getPending":6},null,{"post_":10,"postError":10,"postPending":6,"savedRoutePath":10,"isAuthorized":12,"firstNameLetter":13,"fullName":13,"userId":13,"processingRefresh":12,"showAuthModal":10},false,"",{"searchQuery":13,"savedList":15,"limit":16,"offset":17,"loading":12,"isSearchOpened":12,"page":18},[],10,0,1,{"loading":12},{"get_":10,"getError":10,"getPending":6,"headerSearchQuery":13,"pageSearchQuery":13,"selectedSuggestionIndex":21,"focusOn":22},-1,"header",{"get_":10,"getError":10,"getPending":6,"loading":12,"isExtendedSearchOpened":12,"chosenFilters":24},{},{"showCategories":12,"isFixed":12},{"get_":10,"getError":10,"getPending":6,"put_":-1,"putError":10,"putPending":6,"delete_":-1,"deleteError":10,"deletePending":6},{"get_":28,"getError":10,"getPending":12,"headers":1623,"timeline":1632,"isFullScreen":12,"getCache":1633},{"article":29,"components":1617},{"content":30,"createdAt":1593,"id":1594,"lastVersionId":1595,"meta":1596,"sections":10,"slug":1610,"tags":1611,"updatedAt":1593},{"article":31,"biblioRecord":1560,"category":1561,"categorySlug":1562,"sidebar":1563,"title":1592},[32],{"content":33,"type":1559},[34],{"attrs":35,"content":37,"marks":10,"text":13,"type":1559},{"section_id":36},"fb33f05e-7712-46a0-9593-38f874ea85ab",[38,95,103,111,121,210,344,377,386,396,759,768,884,893,958,967,1075,1084,1160,1169,1311,1346,1551],{"attrs":39,"content":40,"marks":10,"text":13,"type":94},{"textAlign":10},[41,53,58,73,78,89],{"attrs":10,"content":10,"marks":42,"text":51,"type":52},[43,47],{"attrs":44,"content":10,"marks":10,"text":13,"type":46},{"version":45},"1","bold",{"attrs":48,"content":10,"marks":10,"text":13,"type":50},{"class":49,"version":45},"text-color-black","text_class","Хими́ческое осажде́ние из га́зовой фа́зы ","text",{"attrs":10,"content":10,"marks":54,"text":57,"type":52},[55],{"attrs":56,"content":10,"marks":10,"text":13,"type":50},{"class":49,"version":45},"(англ. 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