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style="stroke:#000;stroke-linecap:round;stroke-width:2.054;fill:none" x1="283.73" y1="436.27" x2="312.77" y2="407.22"/><line style="stroke:#000;stroke-linecap:round;stroke-width:2.054;fill:none" x1="312.77" y1="436.27" x2="283.72" y2="407.23"/></g></svg></a></div></div></div></div><div id="int-menu-title"><h1>CD-Labor an TU Graz erforscht neue Halbleitermaterialien</h1></div><div id="int-content"><div id="int-content-singlenews"> <span id="c28823"></span> <div class="news-single-item"> <div> 22.11.2024 | <html xmlns:f="http://typo3.org/ns/TYPO3/CMS/Fluid/ViewHelpers" xmlns:pi="http://typo3.org/ns/WebentwicklerAt/TuNews/ViewHelpers" > <a href="/tu-graz/services/news-stories/tu-graz-news/aktuelle-news"> TU Graz news </a> | <a href="/tu-graz/services/news-stories/tu-graz-news/forschung"> Forschung </a> </html> <p class="bodytext"> <a href="javascript:linkTo_UnCryptMailto(%27ocknvq%2Crjknkrr0lctmgBvwitcb0cv%27);">Von Philipp Jarke</a> </p> </div> <h2> Mit energie- und ressourcensparenden Methoden will ein Forschungsteam am Institut für anorganische Chemie der TU Graz hochwertige dotierte Siliziumschichten für die Elektronik- und Solarbranche ermöglichen. </h2> <div class="news-image-banner"> <div class="media-img-container"> <div class="media-img-item"> <a href="https://www.tugraz.at/fileadmin/user_upload/tugrazInternal/News_Stories/Medienservice/2024/CD-Labor-Haas/Banner_F-LU-24-CD-Labor-Michael-HAAS-by-Lunghammer-tugraz-23.jpg" title="Michael Haas (l.) vom Institut für Anorganische Chemie der TU Graz sucht in seinem CD-Labor nach neuen Ausgangsmaterialien für Halbleiter. Bildquelle: Lunghammer - TU Graz" class="media-img" rel="media-img"> <img title="Michael Haas (l.) vom Institut für Anorganische Chemie der TU Graz sucht in seinem CD-Labor nach neuen Ausgangsmaterialien für Halbleiter. Bildquelle: Lunghammer - TU Graz" alt="Zwei Männer sitzen vor einem Computer und betrachten ein Diagramm auf dem Monitor." src="https://www.tugraz.at/fileadmin/_processed_/f/7/csm_Banner_F-LU-24-CD-Labor-Michael-HAAS-by-Lunghammer-tugraz-23_de7ee96e5e.jpg" width="920" height="460" /> </a> </div> <div class="media-img-desc"> Michael Haas (l.) vom Institut für Anorganische Chemie der TU Graz sucht in seinem CD-Labor nach neuen Ausgangsmaterialien für Halbleiter. Bildquelle: Lunghammer - TU Graz </div> </div> </div> <div class="news-single-content"> <p>Die weltweite Produktion von Halbleitern wächst rasant und damit die Nachfrage nach Vorprodukten, insbesondere kristallinem Silizium. Bei dessen energieintensiver Herstellung lässt sich aber nur ein Viertel des eingesetzten Rohsiliziums nutzen. Dies führt zu großen Abfallmengen. Im heute eröffneten „Christian Doppler Labor für Neue Halbleitermaterialien basierend auf funktionalisierten Hydridosilanen“ forscht ein Team um Laborleiter Michael Haas vom Institut für Anorganische Chemie der TU Graz an Alternativen: Gefördert vom Bundesministerium für Arbeit und Wirtschaft erkunden die Forschenden gemeinsam mit Unternehmenspartner <span lang="en">Air Liquide Advanced Materials</span> neuartige Ausgangsmaterialien für die energieeffizientere Produktion von Halbleitern. Im Mittelpunkt steht die Verarbeitung von funktionalisierten Hydrosilanen. Dabei handelt es sich um chemische Verbindungen, die vorrangig aus Silizium- und Wasserstoffatomen aufgebaut sind.</p> <h2>Arbeits- und Wirtschaftsministerium fördert Erforschung neuer Halbleitermaterialien</h2> <p>Arbeits- und Wirtschaftsminister Martin Kocher, dessen Ministerium wesentlich zur öffentlichen Finanzierung der <abbr title="Christian Doppler">CD</abbr>-Labors beiträgt: „Halbleiter fungieren als zentrale Schlüsseltechnologien für den Standort. Österreich konnte sich in den letzten Jahren als bedeutendes Forschungs- und Produktionsland für Mikroelektronik etablieren. Dadurch werden hochwertige Arbeitsplätze gesichert und die Wettbewerbsfähigkeit gestärkt. Das heute eröffnete <abbr title="Christian Doppler">CD</abbr>-Labor forscht an Premium-Halbleitern für die <span lang="en">Computer</span>industrie und fördert den technologischen Vorsprung. Insbesondere Hydrosilane gelten hier als vielversprechendes Material für die Zukunft. Durch die Erforschung ihrer chemischen Eigenschaften wird die Grundlage für neue innovative Halbleitermaterialien geschaffen. Davon profitieren alle Beteiligten, insbesondere der <span lang="en">High-Tech</span>-Standort Österreich.“</p> <p>„Der große Vorteil von Hydrosilanen ist die Instabilität dieser Verbindungen ab 300 <abbr title="Grad Celsius">°C</abbr> oder bei Einwirkung von <abbr title="ultraviolettem">UV</abbr>-Licht. Die relativ schwachen Bindungen zwischen den Silizium-Atomen brechen dann innerhalb von Minuten auf“, erläutert Laborleiter Michael Haas. „Mittels Flüssigphasenabscheidung lässt sich daraus Silizium gewinnen, das sich für Solarzellen oder Halbleiter-Anwendungen eignet.“ Durch die niedrige Temperatur ist der Energieverbrauch dieses Verfahrens vergleichsweise gering. Erheblicher Forschungsbedarf besteht bei der Verwendung von funktionalisierten Hydrosilanen für die Herstellung dotierter Siliziumfilme; dabei handelt es sich um Siliziumschichten, die mit sogenannten “Fremdatomen“ angereichert sind, um die Materialeigenschaften gezielt zu beeinflussen.</p> <p>Um diese Lücke zu schließen, werden die Forschenden neuartige funktionalisierte Hydrosilane herstellen und charakterisieren, um sie anschließend mittels verschiedener Abscheidetechniken zu dotierten Siliziumschichten zu verarbeiten. Abschließend ermitteln sie die relevanten Paramater dieser neuen Halbleitermaterialien, darunter ihre Morphologie, Leitfähigkeit, Absorptionseigenschaften und die Elementverteilung. „Unser Ziel ist die Entwicklung neuer Methoden, um die Herstellung vielseitiger siliziumbasierter Halbleitermaterialien energie- und ressourcenschonend zu ermöglichen. Davon würden Industrie, Endkund*innen und die Umwelt gleichermaßen profitieren“, sagt Michael Haas.</p> <h2>Über die Christian Doppler Labors</h2> <p>In Christian Doppler Labors wird anwendungsorientierte Grundlagenforschung auf hohem Niveau betrieben, hervorragende Wissenschafter*innen kooperieren dazu mit innovativen Unternehmen. Für die Förderung dieser Zusammenarbeit gilt die Christian Doppler Forschungsgesellschaft international als <span lang="en">Best-Practice</span>-Beispiel. Christian Doppler Labors werden von der öffentlichen Hand und den beteiligten Unternehmen gemeinsam finanziert. Wichtigster öffentlicher Fördergeber ist das Bundesministerium für Arbeit und Wirtschaft (BMAW).</p> <p class="news-text-info">Sie möchten die aktuellen <span lang="en">Stories, News, </span>Forschungsgeschichten, Interviews oder Blogbeiträge der TU Graz direkt auf Ihr <span lang="en">Smartphone </span>oder in Ihren <span lang="en">E-Mail</span>-Eingang erhalten? Abonnieren Sie kostenfrei den <a href="https://www.tugraz.at/tu-graz/services/news-stories/telegram-newsletter/" target="_blank" class="int-link-external">TU Graz-Telegram-<span lang="en">Newsletter</span></a>.</p> </div> </div> <div class="int-content-box int-content-box-type-6 int-content-box-left int-content-box-imgsize-0 "> <div class="int-content-box-overlay"> <svg class="int-content-box-icon-box" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns="http://www.w3.org/2000/svg" height="8.4666mm" width="8.4666mm" version="1.1" xmlns:cc="http://creativecommons.org/ns#" xmlns:dc="http://purl.org/dc/elements/1.1/" viewBox="0 0 29.999836 29.999819"><g transform="translate(-420.09 -188.79)"><path d="m446.23 188.79h-9.5425c-3.7066 0-3.7114 0.004-3.7114 4.377v21.25c0 4.3371-0.0221 4.3731 3.7114 4.3731h9.5425c3.7066 0 3.7114 0.003 3.7114-4.3731v-21.25c0-4.3726-0.005-4.377-3.7114-4.377zm-7.4227 2.5023h5.3015c0.29293 0 0.53095 0.27628 0.53095 0.6236 0 0.34337-0.23802 0.6236-0.53095 0.6236h-5.3015c-0.2916 0-0.52963-0.28023-0.52963-0.6236 0-0.34732 0.23803-0.6236 0.52963-0.6236zm4.7719 24.376c0 0.34338-0.23803 0.6236-0.52962 0.6236h-3.1817c-0.29159 0-0.52962-0.28022-0.52962-0.6236v-2.5023c0-0.34732 0.23803-0.62359 0.52962-0.62359h3.1817c0.29159 0 0.52962 0.27627 0.52962 0.62359zm4.241-6.2518c0 1.0341-0.71408 1.8747-1.5902 1.8747h-9.5425c-0.87746 0-1.5902-0.84067-1.5902-1.8747v-13.751c0-1.0341 0.71274-1.8747 1.5902-1.8747h9.5425c0.87611 0 1.5902 0.84067 1.5902 1.8747v13.751"></path></g></svg> </div> <div id="" class="csc-default"> <p class="bodytext"> <header class="csc-header"> <h2>Kontakt</h2> </header> <p>Michael Haas<br /> Priv.-Doz. Dipl.-Ing. Dr.techn. BSc<br /> TU Graz | Institut für Anorganische Chemie<br /> Tel.: +43 316 873 32116<br /> <a href="javascript:linkTo_UnCryptMailto(%27ocknvq%2Cokejcgn0jccuBvwitcb0cv%27);" class="int-link-mail">michael.haas<span style="display: none;">noSpam</span>@tugraz.at</a></p> </p> </div> </div> <div id="media-img-box"> <div class="news-image"> <div class="media-img-container"> <div class="media-img-item"> <a href="https://www.tugraz.at/fileadmin/user_upload/tugrazInternal/News_Stories/Medienservice/2024/CD-Labor-Haas/F-LU-24-CD-Labor-Michael-HAAS-by-Lunghammer-tugraz-4.jpg" title="Das Team des CD-Labors für Neue Halbleitermaterialien basierend auf funktionalisierten Hydridosilanen (v.l.): Matthias Paris, Daniel Grieß, Madeleine Heurix, Thomas Lainer, Laborleiter Michael Haas und Monika Filzwieser. Bildquelle: Lunghammer - TU Graz" class="media-img" rel="media-img" target="_blank"> <img title="Das Team des CD-Labors für Neue Halbleitermaterialien basierend auf funktionalisierten Hydridosilanen (v.l.): Matthias Paris, Daniel Grieß, Madeleine Heurix, Thomas Lainer, Laborleiter Michael Haas und Monika Filzwieser. Bildquelle: Lunghammer - TU Graz" alt="Sechs Personen in weißen Labormänteln, zwei Frauen und vier Männer, lächeln in die Kamera." src="https://www.tugraz.at/fileadmin/_processed_/3/b/csm_F-LU-24-CD-Labor-Michael-HAAS-by-Lunghammer-tugraz-4_f69f4af981.jpg" width="403" height="330" /> </a> </div> <div class="media-img-desc"> Das Team des CD-Labors für Neue Halbleitermaterialien basierend auf funktionalisierten Hydridosilanen (v.l.): Matthias Paris, Daniel Grieß, Madeleine Heurix, Thomas Lainer, Laborleiter Michael Haas und Monika Filzwieser. Bildquelle: Lunghammer - TU Graz </div> </div> <div class="media-img-container"> <div class="media-img-item"> <a href="https://www.tugraz.at/fileadmin/user_upload/tugrazInternal/News_Stories/Medienservice/2024/CD-Labor-Haas/F-LU-24-CD-Labor-Michael-HAAS-by-Lunghammer-tugraz-23.jpg" title="Michael Haas (l.) und Thomas Lainer vom Institut für Anorganische Chemie der TU Graz. Bildquelle: Lunghammer - TU Graz" class="media-img" rel="media-img" target="_blank"> <img title="Michael Haas (l.) und Thomas Lainer vom Institut für Anorganische Chemie der TU Graz. Bildquelle: Lunghammer - TU Graz" alt="Zwei Männer sitzen vor einem Computer und betrachten ein Diagramm auf dem Monitor." src="https://www.tugraz.at/fileadmin/_processed_/d/a/csm_F-LU-24-CD-Labor-Michael-HAAS-by-Lunghammer-tugraz-23_94552199c8.jpg" width="434" height="289" /> </a> </div> <div class="media-img-desc"> Michael Haas (l.) und Thomas Lainer vom Institut für Anorganische Chemie der TU Graz. Bildquelle: Lunghammer - TU Graz </div> </div> <div class="media-img-container"> <div class="media-img-item"> <a href="https://www.tugraz.at/fileadmin/user_upload/tugrazInternal/News_Stories/Medienservice/2024/CD-Labor-Haas/F-LU-24-CD-Labor-Michael-HAAS-by-Lunghammer-tugraz-32.jpg" title="Laborleiter Michael Haas vom Institut für Anorganische Chemie der TU Graz. Bildquelle: Lunghammer - TU Graz" class="media-img" rel="media-img" target="_blank"> <img title="Laborleiter Michael Haas vom Institut für Anorganische Chemie der TU Graz. Bildquelle: Lunghammer - TU Graz" alt="Ein Mann lächelt in die Kamera" src="https://www.tugraz.at/fileadmin/_processed_/2/b/csm_F-LU-24-CD-Labor-Michael-HAAS-by-Lunghammer-tugraz-32_c76672dee9.jpg" width="220" height="330" /> </a> </div> <div class="media-img-desc"> Laborleiter Michael Haas vom Institut für Anorganische Chemie der TU Graz. Bildquelle: Lunghammer - TU Graz </div> </div> </div> </div> <div class="news-single-backlink"> <h2> <a href="/tu-graz/services/news-stories/medienservice/aktuelle-meldungen-und-services"> Zurück zu: Aktuelle Meldungen und Services </a> </h2> </div> </div></div></div> <div id="all-footer"><div id="all-footer-height"><div id="all-footer-openclose"><a href="#null"><svg id="all-footer-openclose-icon" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns="http://www.w3.org/2000/svg" xmlns:cc="http://creativecommons.org/ns#" xmlns:dc="http://purl.org/dc/elements/1.1/" height="30.02" width="30.02" version="1.1" viewBox="0 0 30.0204 30.020398"> <g transform="translate(-472.03 -776.46)"> <path style="stroke-linejoin:round;stroke:#e4154b;stroke-linecap:round;stroke-miterlimit:10;stroke-width:1.25;fill:none" d="m483.91 805.85v-17.5"/> <path style="stroke-linejoin:round;stroke:#e4154b;stroke-linecap:round;stroke-miterlimit:10;stroke-width:1.25;fill:none" d="m490.16 794.59v-17.5"/> <path 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